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The Monte Carlo programme PENEPMA performs simulations of X-ray emission from samples bombarded with electron beams. It is both based on the general-purpose Monte Carlo simulation package PENELOPE, an elaborate system for the simulation of coupled electron-photon transport in arbitrary materials, and on the geometry subroutine package PENGEOM, which tracks particles through complex material structures defined by quadric surfaces. In this work, we give a brief overview of the capabilities of the latest version of PENEPMA along with several examples of its application to the modelling of electron probe microanalysis measurements.

PENEPMA: a Monte Carlo programme for the simulation of X-ray emission in EPMA