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We have developed a software for fast calculation of capacitances in planarsilicon pixel and strip sensors, based on 3D and 2D numerical solutions of theLaplace's equation. The validity of the 2D calculations was checked withcapacitances measurements on Multi-Geometry Silicon Strip Detectors (MSSD). The3D calculations were tested by comparison with pixel sensors capacitancemeasurements from literature. In both cases the Laplace equation results werecompared with simulations obtained from the TCAD Sentaurus suite. The developedsoftware is a useful tool for fast estimation of interstrip, interpixel andbackplane capacitances, saving computation time, as a first approximationbefore using a more sophisticated platform for more accurate results if needed.

journal of instrumentation

Fast calculation of capacitances in silicon sensors with 3D and 2D  numerical solutions of the Laplace's equation and comparison with  experimental data and TCAD simulations