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The ATLAS experiment at the LHC will replace its current inner tracker systemfor the HL-LHC era. 3D silicon pixel sensors are being considered asradiation-hard candidates for the innermost layers of the new fullysilicon-based tracking detector. 3D sensors with a small pixel size of$\mathrm{50 \times 50~\mu m^{2}}$ and $\mathrm{25 \times 100~\mu m^{2}}$compatible with the first prototype ASIC for the HL-LHC, the RD53A chip, havebeen studied in beam tests after uniform irradiation to $\mathrm{5 \times10^{15}~n_{eq}/cm^{2}}$. An operation voltage of only 50 V is needed to achievea 97% hit efficiency after this fluence.

Performance of Irradiated RD53A 3D Pixel Sensors