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Combining analysis from phonon signals and photon signals is a powerfultechnique for reducing backgrounds in bolometer-based rare event searches.Anti-reflective coatings can significantly increase the performance of thesecondary light-sensing bolometer in these experiments. As a first step towardthese improvements, coatings of SiO$_2$, HfO$_2$, and TiO$_2$ on Ge and Siwafers were fabricated and characterized at room temperature and multipleangles of incidence.

Characterization of single layer anti-reflective coatings for bolometer-based rare event searches