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Synopsis The current contribution relates to a recently endorsed Marie Skłodowska-Curie Innovative Training Network on Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods; ELENA. Here we discuss the objectives of ELENA relating to the understanding the low energy electron induced processes underpinning two emerging nanotechnology methods; focused electron beam induced deposition (FEBID) and extreme ultra violet lithography (EUVL).

journal of physics. conference series

Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods (ELENA); a Marie Skłodowska-Curie Innovative Training Network