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Low energy electron interaction with organometallics has received appreciable attention in recent years [1], specifically in relation to the use of these compounds as precursors in focused electron beam induced dep-­‐ osition (FEBID) [2,3]. For the fabrication of alloy nanostructures through FEBID, the use of heteronu-­‐ clear precursors is an attractive alternative to mixed gas or multiple gas inlet systems. To date, however, the use of heteronuclear organometallics in FEBID and related studies on such potential precursor mole-­‐ cules are limited. In fact, the only FEBID work with heteronuclear precursors we are aware of are that with HFeCo3(CO)12 [4] and unpublished work with H2FeRu3(CO)13 [5]. In the first case, i.e., HFeCo3(CO)12 a typical metal purity of 80% with 1:3 FeCo ratio was reached, clearly attesting the feasibility of using bime-­‐ tallic precursors for pure alloy deposition.

journal of physics. conference series

A combined experimental and theoretical study on dissociative ionization and dissociative electron attachment to the heteronuclear FEBID precursor; HFeCo3(CO)12