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Synopsis Emission of M-X-rays in interaction of slow highly charged Xe ions, delivered by electron beam ion source (EBIS), with metallic surfaces was studied. Measured M-X-ray spectra for different charge states give access to interpret both the dynamics of neutralization of highly charged ions at surfaces and relaxation processes of hollow atoms formed in this process. The measured spectra are interpreted in terms of the performed atomic structure calculations using the GRASP code.

M-X-ray emission in interaction of slow highly charged Xeq+ ions (q=26-40) with metallic foils