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Slow (10–100 keV) highly-charged ion (HCI) beams have been widely used for processing and analysis of materials. In order to use the slow HCI in microscopic analysis and modification, small and stable micro-HCI beam generators are required. In 2006, we demonstrated a simple and convenient method for producing microbeams using a single tapered glass capillary with an outlet diameter of 24 m. The beam transportation is based on self-organized charge patches on the inner surface of the capillary, which are induced by the incident beam itself [1]. However, transmitted microbeams sometimes become unstable and their transmission can be blocked or suddenly increased. In order to solve the problem, a tandem glass-made optics consisting of a 4-electrode capillary, from Hamamatsu Photonics K.K. (Fig.1(a)), and a tapered capillary tip with a sub-m sized outlet (Figs. 1(b)) was developed. The larger capillary had 4 ring-electrodes on its outer surface. The unstable transmission was expected to be due to too much charge-up around the position marked by a circle S in Fig.1(a). The outlet surface of the larger capillary and the inlet surface of the smaller one touched each other and were connected to electrode-A, so that the excess charge is removed toward the ground level periodically through a mechanical relay (active discharging, Fig.1(c)). The relay was controlled by TTL signals with a frequency fTTL ~ 0.1 Hz [2]. Figure 1(d) shows the number of transmitted ions per second Ntransmit for a 104-keV Ar beam at the Slow Highly Charged Ion Facility in RIKEN. During a period (3050-3350s) without relay operation, the transmission became gradually blocked and eventually stopped. When the TTL sending restarted, the transmission also started again and remained constant until the input beam stopped. When only a 4-electrode capillary was used, the density of the extracted beam became up to 14 times larger than that of the input beam. A transmission efficiency up to 70% was observed with good reproducibility when the electrodes were biased with appropriate voltages.

Active discharging method for stable sub-micron sized beams of slow highly charged ions using tapered glass capillary with electrodes