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The double color interferometric microscope is developed for step height standards nanometrology traceable to meter definition via primary wavelength laser standards. The setup is based on two stabilized lasers to provide traceable measurements of highest possible resolution down to the physical limits of the optical instruments in sub-nanometer to micrometer range of the heights. The wavelength reference is He-Ne 633 nm stabilized laser, the secondary source is Blue-Green 488 nm grating laser diode. Accurate fringe portion is measured by modulated phase-shift technique combined with imaging interferometry and Fourier processing. Self calibrating methods are developed to correct systematic interferometric errors.

High-resolution interferometic microscope for traceable dimensional nanometrology in Brazil