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Co2FeSi/GaAs(110) and Co2FeSi/GaAs(-1-1-1)B hybrid structures were grown bymolecular-beam epitaxy (MBE) and characterized by transmission electronmicroscopy (TEM) and X-ray diffraction (XRD). The films contain inhomogeneousdistributions of ordered L21 and B2 phases. The average stoichiometry could bedetermined by XRD for calibration of the MBE sources. Diffusion processes leadto inhomogeneities, influencing long-range order. An average L21 ordering of upto 65% was measured by grazing-incidence XRD. Lateral inhomogeneities of thespatial distribution of long-range order in Co2FeSi were imaged usingdark-field TEM with superlattice reflections and shown to correspond tovariations of the Co/Fe ratio.

Characterization of L21 order in Co2FeSi thin films on GaAs