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Quantification of energy-dispersive X-ray spectra in transmission electron microscopy is often unreliable for X-ray lines of low energy, as they are subject to strong absorption and fluorescence corrections which will depend critically on both the sample thickness and the detector properties (take-off angle, detector material and type, thickness and cleanliness of any detector window). By using the method to vary the take-off angle between repeated measurements in energy-dispersive X-ray spectroscopy from the same region, an attempt has been made to study our ability to determine the depth of a buried epitaxial thin layer within a plan-view sample and to correctly assess the composition of specimens containing lighter elements. By using several different Monte Carlo simulation programs, the attenuation of the X-rays along their path towards the detector can be calculated and the predicted results can be compared to experimental measurements. Comparison of two different programs to experimental results has been made, for an InAs quantum well buried beneath a GaAs cap layer and a NiO thin film specimen.

Self-consistent absorption corrections for low-energy X-ray lines in energy-dispersive X-ray spectroscopy