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Current limitations in piezoelectric and electrostatic transducers are discussed. A force-feedback electrostatic transducer capable of operating at bandwidths up to 20 kHz is described. Advantages of the proposed design are a linearised operation which simplifies the feedback control aspects and robustness of the performance characteristics to environmental perturbations. Applications in nanotechnology, optical sciences and acoustics are discussed.

Performance limitations of piezoelectric and force feedback electrostatic transducers in different applications