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We present our studies of the parameters of helium beam plasma. The beam plasma was generated by a powerful focused electron beam propagating through helium atmosphere at a pressure of 25 Pa. The beam power varied in the range 80 to 1000 W. We have determined the electron beam parameters that enable one to generate a beam plasma with a density greater than 10 16  m −3 . Using the plasma ions, we have conducted treatment of polymer materials. It has been shown that the beam plasma treatment in the forevacuum range of pressure enhances the hydrophilic properties of fluoroplastic surfaces.

Electron-beam plasma and its applications to polymer treatment in the forevacuum