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We report on the realization of silicon nitride membranes with enhanced andelectrically tunable reflectivity. A subwavelength one-dimensional grating isdirectly patterned on a suspended 200 nm-thick, high stress commercial filmusing electron beam lithography. A Fano resonance is observed in thetransmission spectrum of TM polarized light impinging on the membrane at normalincidence, leading to an increase in its reflectivity from 10% to 78% at 937nm. The observed spectrum is compared to the results of rigorous coupled waveanalysis simulations based on measurements of the grating transverse profilethrough localized cuts of the suspended film with a Focused Ion Beam. Bymounting the membrane chip on a ring piezoelectric transducer and applying acompressive force to the substrate we subsequently observe a shift of thetransmission spectrum by 0.23 nm.

Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity