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Nitrogen Vacancy (NV) centers in diamond are a platform for several importantquantum technologies, including sensing, communication and elementary quantumprocessors. In this letter we demonstrate the creation of NV centers byimplantation using a deterministic single ion source. For this wesympathetically laser-cool single $^{15}\textrm{N}_2^+$ molecular ions in aPaul trap and extract them at an energy of 5.9\,keV. Subsequently the ions arefocused with a lateral resolution of 121(35)\,nm and are implanted into adiamond substrate without any spatial filtering by apertures or masks. Afterhigh-temperature annealing, we detect the NV centers in a confocal microscopeand determine a conversion efficiency of about 0.6\,$\%$. The$^{15}\textrm{NV}$ centers are characterized by optically detected magneticresonance (ODMR) on the hyperfine transition and coherence time.

Fabrication of $^{15}\textrm{NV}^{-}$ centers in diamond using a deterministic single ion implanter