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We propose an experimental method to fully characterize the energy exchangeof particles during the physical vapor deposition process of thin surfacelayers. Our approach is based on the careful observation of perturbations ofthe oscillation frequency of a Quartz Crystal $\mu$-balance induced by theparticles interaction. With this technique, it is possible to measure themomentum exchange of the atoms during the evaporation process and determine theideal evaporation rate for an uniform energy distribution. We are able tofollow the desorption dynamics of particles immediately after the first layershave been formed. These results are in close relation to the surface bindingenergy of the evaporated material, they offer a better control to obtain thedesired properties of the thin surface layer. We applied our technique toinvestigate the physical vapor evaporation process for diverse elements,usually implemented in the development of film surface layers, such as Cu, W,Au, Gd and In, and confirm that our results are in agreement with measurementsdone previously with other techniques such as low-temperaturephotoluminescence.

Energy exchanges between atoms with a quartz crystal $\mu$-balance