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We report on widefield microwave vector field imaging with sub um resolutionusing a microfabricated alkali vapor cell. The setup can additionally image dcmagnetic fields, and can be configured to image microwave electric fields. Ourcamera-based widefield imaging system records 2D images with a 6x6 mm2 field ofview at a rate of 10 Hz. It provides up to 50 um spatial resolution, and allowsimaging of fields as close as 150 um above structures, through the use of thinexternal cell walls. This is crucial in allowing us to take practical advantageof the high spatial resolution, as feature sizes in near-fields are on theorder of the distance from their source, and represents an order of magnitudeimprovement in surface-feature resolution compared to previous vapor cellexperiments. We present microwave and dc magnetic field images above aselection of devices, demonstrating a microwave sensitivity of 1.4 uT/sqrt-Hzper 50x50x140 um3 voxel, at present limited by the speed of our camera system.Since we image 120x120 voxels in parallel, a single scanned sensor wouldrequire a sensitivity of at least 12 nT/sqrt-Hz to produce images with the samesensitivity. Our technique could prove transformative in the design,characterisation, and debugging of microwave devices, as there are currently nosatisfactory established microwave imaging techniques. Moreover, it could findapplications in medical imaging.

Widefield Microwave Imaging in Alkali Vapor Cells with sub-100 um Resolution