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In order to fully understand nanoscale heat transport it is necessary tospectrally characterize phonon transmission in nanostructures. Towards thisgoal we have developed a microfabricated phonon spectrometer. We utilizemicrofabricated superconducting tunnel junction-based (STJ) phonon transducersfor the emission and detection of tunable, non-thermal, and spectrally resolvedacoustic phonons, with frequencies ranging from ~100 to ~870 GHz, in siliconmicrostructures. We show that phonon spectroscopy with STJs offers a spectralresolution of ~15-20 GHz, which is ~20 times better than thermal conductancemeasurements, for probing nanoscale phonon transport. The STJs are Al-AlxOy-Altunnel junctions and phonon emission and detection occurs via quasiparticleexcitation and decay transitions that occur in the superconducting films. Weelaborate on the design geometry and constraints of the spectrometer, thefabrication techniques, and the low-noise instrumentation that are essentialfor successful application of this technique for nanoscale phonon studies. Wediscuss the spectral distribution of phonons emitted by an STJ emitter and theefficiency of their detection by an STJ detector. We demonstrate that thephonons propagate ballistically through a silicon microstructure, and thatsubmicron spatial resolution is realizable in a design such as ours. Spectrallyresolved measurements of phonon transport in nanoscale structures andnanomaterials will further the engineering and exploitation of phonons, andthus have important ramifications for nanoscale thermal transport as well asthe burgeoning field of nanophononics.

Design and operation of a microfabricated phonon spectrometer utilizing superconducting tunnel junctions as phonon transducers