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The influence of the buffer layer of hafnia dielectric on superconductingproperties of niobium nitride films, produced by the technique of the reactivemagnetron depositing has been investigated for the first time. This studypresents a comprehensive analysis of morphological, microstructural, andelectrophysical parameters of thin NbN films.

Investigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer