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Active plasma resonance spectroscopy (APRS) refers to a class of plasmadiagnostic methods that use the ability of plasma to resonate at or near theelectron plasma frequency for diagnostic purposes. The planar multipoleresonance probe (pMRP) is an optimized realization of APRS. It has anon-invasive structure and allows simultaneous measurement of the electrondensity, electron temperature, and electron-neutral collision frequency.Previous work has investigated the pMRP through the Drude model andcollision-less kinetic model. The Drude model misses important kinetic effectssuch as collision-less kinetic damping. The collision-less kinetic model isable to capture pure kinetic effects. However, it is only applicable tolow-pressure plasma. To further study the behavior of the pMRP, we develop acollisional kinetic model in this paper, which applies to arbitrary pressure.In this model, the kinetic equation is coupled to the Poisson equation underthe electrostatic approximation. The real part of the general admittance iscalculated to describe the spectral response of the probe-plasma system. Bothcollision-less kinetic damping and collisional damping appear in the spectrum.This model provides a possibility to calculate the electron density, electrontemperature, and electron-neutral collision frequency from the measurements.

Kinetic investigation of the planar Multipole Resonance Probe under arbitrary pressure