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We apply the Ionization Region Model (IRM) and the Orsay Boltzmann equationfor ELectrons coupled with Ionization and eXcited states kinetics (OBELIX)model to study the electron kinetics of a high power impulse magnetronsputtering (HiPIMS) discharge. In the IRM the bulk (cold) electrons are assumedto exhibit a Maxwellian energy distribution and the secondary (hot) electrons,emitted from the target surface upon ion bombardment, are treated as a highenergy tail, while in the OBELIX the electron energy distribution is calculatedself-consistently using an isotropic Boltzmann equation. The two models aremerged in the sense that the output from the IRM is used as an input forOBELIX. The temporal evolutions of the particle densities are found to agreevery well between the two models. Furthermore, a very good agreement isdemonstrated between the bi-Maxwellian electron energy distribution assumed bythe IRM and the electron energy distribution calculated by the OBELIX model. Itcan therefore be concluded that assuming a bi-Maxwellian electron energydistribution, constituting a cold bulk electron group and a hot secondaryelectron group, is a good approximation for modeling the HiPIMS discharge.

On the electron energy distribution function in the high power impulse magnetron sputtering discharge