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A particle-in-cell (PIC) simulation study is performed to investigate thedischarge asymmetry, higher harmonic generations and electron heating mechanismin a low pressure very high frequency capacitively coupled plasma (CCP) excitedby a saw-tooth like current waveform. Two current densities, 50 A/m2 and 100A/m2 are chosen for a constant gas pressure of 5 mTorr in argon plasma. Thedriving frequency is varied from 13.56 MHz to 54.24 MHz. At a lower drivingfrequency, high frequency modulations on the instantaneous sheath edge positionat the grounded electrode are observed. These high frequency oscillationscreate multiple ionization beam like structures near to the sheath edge thatdrives the plasma density in the discharge and responsible fordischarge/ionization asymmetry at lower driving frequency. Conversely, theelectrode voltage shows higher harmonics generation at higher drivingfrequencies and corresponding electric field transients are observed into thebulk plasma. At lower driving frequency, the electron heating is maximum nearto the sheath edge followed by electron cooling within plasma bulk, however,alternate heating and cooling i.e. burst like structures are obtained at higherdriving frequencies. These results suggest that electron heating in thesedischarges will not be described accurately by simple analytical models.

plasma sources science and technology

High frequency sheath modulation and higher harmonic generation in a low  pressure very high frequency capacitively coupled plasma excited by sawtooth  waveform