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Using Monte Carlo Collisions (MCC) method, we have performed simulations ofion velocity distribution functions (IVDF) taking into account both elasticcollisions and charge exchange collisions of ions with atoms in uniformelectric fields for argon and helium background gases. The simulation resultsare verified by comparison with the experiment data of the ion drift velocitiesand the ion transverse diffusion coefficients in argon and helium. The recentlypublished experimental data for the first seven coefficients of the Legendrepolynomial expansion of the ion energy and angular distribution functions areused to validate simulation results for IVDF. Good agreements between measuredand simulated IVDFs show that the developed simulation model can be used foraccurate calculations of IVDFs.

Ion velocity distribution functions in argon and helium discharges: detailed comparison of numerical simulation results and experimental data