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Electron beam induced deposition (EBID) currently provides the only directwriting technique for truly three-dimensional nanostructures with geometricalfeatures below 50 nm. Unfortunately, the depositions from metal-organicprecursors suffer from a substantial carbon content. This hinders manyapplications, especially in plasmonics where the metallic nature of thegeometric surfaces is mandatory. To overcome this problem a post-depositiontreatment with oxygen plasma at room temperature was investigated for thepurification of gold containing EBID structures. Upon plasma treatment, thestructures experience a shrinkage in diameter of about 18 nm but entirely keeptheir initial shape. The proposed purification step results in a core-shellstructure with the core consisting of mainly unaffected EBID material and agold shell of about 20 nm in thickness. These purified structures areplasmonically active in the visible wavelength range as shown by dark fieldoptical microscopy on helical nanostructures. Most notably, electromagneticmodeling of the corresponding scattering spectra verified that the thicknessand quality of the resulting gold shell ensures an optical response equal tothat of pure gold nanostructures.

Plasmonic Gold Helices for the visible range fabricated by oxygen plasma purification of electron beam induced deposits