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We investigated the specific electronic energy deposition by protons and Heions with keV energies in different transition metal nitrides of technologicalinterest. Data were obtained from two different time-of-flight ion scatteringsetups and show excellent agreement. For protons interacting with lightnitrides, i.e. TiN, VN and CrN, very similar stopping cross sections per atomwere found, which coincide with literature data of N2 gas for primary energies<= 25 keV. In case of the chemically rather similar nitrides with metalconstituents from the 5th and 6th period, i.e. ZrN and HfN, the electronicstopping cross sections were measured to exceed what has been observed formolecular N2 gas. For He ions, electronic energy loss in all nitrides was foundto be significantly higher compared to the equivalent data of N2 gas.Additionally, deviations from velocity proportionality of the observed specificelectronic energy loss are observed. A comparison with predictions from densityfunctional theory for protons and He ions yields a high apparent efficiency ofelectronic excitations of the target for the latter projectile. These findingsare considered to indicate the contributions of additional mechanisms besideselectron hole pair excitations, such as electron capture and loss processes ofthe projectile or promotion of target electrons in atomic collisions.

Electronic excitation of transition metal nitrides by light ions with keV energies