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We conducted experimental studies and computer simulations of standingstriations in capacitive coupled plasma in Argon gas. Standing striations wereobserved at frequencies 3.6, 8.4 and 19.0 MHz, in a pressure range 0.05-10Torr, tube radius R=1.1 cm, for a certain range of discharge currents (plasmadensities). Numerical simulations revealed similar nature of standingstriations in CCP and moving striations in DC discharges under similardischarge conditions. Comparison of computer simulations with experimentalobservations helped clarify the nature of these striations. The non-lineardependence of the ionization rate on electron density is shown to be the mainunderlying mechanism of the stratification phenomena.

Plasma Stratification in Radio-Frequency Discharges of Noble Gases