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Low efficiency is the main drawback of many MEMS thermal energy harvesters.Recently, energy harvesting micro-devices that operate using the pyroelectriceffect gained attention due to their potential superior performance. Operationof these devices is based on the cyclic motion of a pyroelectric capacitor thatoperates between a high temperature and a low temperature reservoirs. In thispaper, we investigate the dynamics of oscillations of a pyroelectric capacitorself sustained by thermally actuated bimetal micro-cantilevers, a topic whichis so far under investigated. In addition to highlighting key thermodynamicaspects of the operation, we explore conditions for self-sustained oscillationsand discuss the viability of operation at the mechanical resonance frequency.The analysis is presented for a new design inspired by the device proposed inRefs.\cite{2011,2012}, where in contrast, our proposed design boasts thefollowing features: The pyroelectric capacitor remains parallel to the heatreservoirs, by virtue of its symmetric support by two bimetallic cantileverbeams; In addition, the cyclic operation of the device does not requirephysical contact, thus lowering the risk of mechanical failure; To adjust thedamping force imparted by the surrounding gas, the thermal reservoirs areequipped with trenches. To study the dynamic operation of the device, wedeveloped a physically based reduced order, yet accurate, model that accountsfor the heat transfer between and within the different components, and for thevarious forces including the gas damping force. The model is embedded within anoptimization algorithm to produce optimal designs over the range 26-38 C oftemperature difference between the two reservoirs. The corresponding range ofharvested power density is 0.4-0.65 mW/cm2.

journal of physics. d, applied physics

Self Sustained Thermally Induced Gas-Damped Oscillations of Bimetal  Cantilevers with Application to the Design of a New Pyroelectric Micro Energy  Harvester