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We report on an optimized micro-machined thermal flow-rate sensor as part ofan autonomous multi-parameter sensing device for water network monitoring. Thesensor has been optimized under the following constraints: low powerconsumption and high sensitivity, while employing a large thermal conductivitysubstrate, namely silicon. The resulting device consists of a platinumresistive heater deposited on a thin silicon pillar ~ 100 $\mu$m high and 5$\mu$m wide in the middle of a nearly 100 $\mu$m wide cavity. Operated underthe anemometric scheme, the reported sensor shows a larger sensitivity in thevelocity range up to 1 m/s compared to different sensors based on similar highconductivity substrates such as bulk silicon or silicon membrane with a powerconsumption of 44 mW. Obtained performances are assessed with both CFDsimulation and experimental characterization.

Sensitivity optimization of micro-machined thermo-resistive flow-rate sensors on silicon substrates