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Axial emission profiles in a parallel plate dc micro discharge (feedgas:argon; discharge gap d=1mm; pressure p=10Torr) were studied by means of timeresolved imaging with a fast ICCD camera. Additionally, volt-ampere (V-A)characteristics were recorded and Ar* metastable densities were measured bytunable diode laser absorption spectroscopy (TDLAS). Axial emission profiles inthe steady state regime are similar to corresponding profiles in standard sizedischarges (d=1cm, p=1Torr). For some discharge conditions relaxationoscillations are present when the micro discharge switches periodically betweenlow current Townsend-like mode and normal glow. At the same time the axialemission profile shows transient behavior, starting with peak distribution atthe anode, which gradually moves towards the cathode during the normal glow.The development of argon metastable densities highly correlates with theoscillating discharge current. Gas temperatures in the low currentTownsend-like mode (T= 320-400K) and the high current glow mode (T=469-526K)were determined by the broadening of the recorded spectral profiles as afunction of the discharge current.

Axial light emission and Ar metastable densities in a parallel plate dc micro discharge in steady state and transient regimes