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With an implicit Particle-in-cell/Monte Carlo model, capacitively coupledplasmas are studied in two-dimensional and axisymmetric geometry. Self-bias dcvoltage effects are self-consistently considered. Due to finite length effects,the self-bias dc voltages show sophisticating relations with the electrodeareas. Two-dimensional kinetic effects are also illuminated. Compare to thefluid mode, PIC/MC model is numerical-diffusion-free and thus finer propertiesof the plasmas are simulated.

plasma sources science and technology

Implicit and electrostatic Particle-in-cell/Monte Carlo model in two  dimensional and axisymmetric geometry II: Self-bias voltage effects in  capacitively coupled plasmas