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We fabricated highly adherent and electrically conductive micropatterns onSU-8 by supersonic cluster beam deposition (SCBD). This technique is based onthe acceleration of neutral metallic nanoparticles produced in the gas phase.The kinetic energy acquired by the nanoparticles allows implantation in a SU-8layer, thus producing a metal-polymer nanocomposite thin layer. Thenanocomposite shows ohmic electrical conduction and it can also be used as anadhesion layer for further metallization with a metallic overlayer. Wecharacterized the electrical conduction, adhesion and biocompatibility ofmicrodevices obtained by SCBD on SU-8 demonstrating the compatibility of ourapproach with standard lift off technology on 4" wafer. A self-standing andflexible Micro Electrode Array has been produced. Cytological tests withneuronal cell lines demonstrated an improved cell growth and a spontaneousconfinement of cells on the nanocomposite layer.

Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8