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Molybdenum rhenium alloy thin films can exhibit superconductivity up tocritical temperatures of $T_c=15\mathrm{K}$. At the same time, the films arehighly stable in the high-temperature methane / hydrogen atmosphere typicallyrequired to grow single wall carbon nanotubes. We characterize molybdenumrhenium alloy films deposited via simultaneous sputtering from two sources,with respect to their composition as function of sputter parameters and theirelectronic dc as well as GHz properties at low temperature. Specific emphasisis placed on the effect of the carbon nanotube growth conditions on the film.Superconducting coplanar waveguide resonators are defined lithographically; wedemonstrate that the resonators remain functional when undergoing nanotubegrowth conditions, and characterize their properties as function oftemperature. This paves the way for ultra-clean nanotube devices grown in situonto superconducting coplanar waveguide circuit elements.

Co-sputtered MoRe thin films for carbon nanotube growth-compatible superconducting coplanar resonators