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Rapid and reproducible assembly of aligned nanostructures on a wafer-scale isa crucial, yet one of the most challenging tasks in the incorporation ofnanowires into integrated circuits. We present the synthesis of a periodicnanochannel template designed for electrochemical growth of perfectly aligned,rectangular nanowires over large areas. The nanowires can be electricallycontacted and characterized in situ using a pre-patterned multi-pointmeasurement platform. During the measurement the wires remain within a thickoxide matrix providing protection against breaking and oxidation. We use laserinterference lithography, reactive ion etching and atomic layer deposition tocreate cm-long parallel nanochannels with characteristic dimensions as small as40 nm. In a showcase study pulsed electrodeposition of iron is carried outcreating rectangular shaped iron nanowires within the nanochannels. By designof the device, the grown wires are in contact with an integrated electrodesystem on both ends directly after the deposition. No further processing stepsare required for electrical characterization, minimizing the risk of damage andoxidation. The developed nanowire measurement device allows for multi-proberesistance measurements and can easily be adopted for transistor applications.The guided, in-plane growth of electrodeposited nanowire arrays which aretunable in size and density paves the way for the incorporation of nanowiresinto a large variety of multifunctional devices.

Electrochemical synthesis of highly ordered nanowires with a rectangular cross-section using an in-plane nanochannel array