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Recently developed classes of monocrystalline silicon solar microcells(u-cell) can be assembled into modules with characteristics (i.e., mechanicallyflexible forms, compact concentrator designs, and high-voltage outputs) thatwould be impossible to achieve using conventional, wafer-based approaches. Inthis paper, we describe a highly dense, uniform and non-periodic nanoconeforest structure of black silicon (bSi) created on optically-thin (30 um)u-cells for broadband and omnidirectional light-trapping with alithography-free and high-throughput plasma texturizing process. With optimizedplasma etching conditions and a silicon nitride passivation layer, blacksilicon u-cells, when embedded in a polymer waveguiding layer, display dramaticincreases of as much as 65.7% in short circuit current, as compared to a baresilicon device. The conversion efficiency increases from 8% to 11.5% with asmall drop in open circuit voltage and fill factor.

Black Silicon Solar Thin-film Microcells Integrating Top Nanocone Structures for Broadband and Omnidirectional Light-Trapping