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W-based granular metals have been prepared by electron beam induceddeposition from the tungsten-hexacarbonyl W(CO)6 precursor. In situ electricalconductivity measurements have been performed to monitor the growth process andto investigate the behavior of the deposit under electron beam post irradiationand by exposure to air. During the first part of the growth process, theelectrical conductivity grows non-linearly, independent of the electron beamparameters. This behavior is interpreted as the result of the increase of theW-particles diameter. Once the growth process is terminated, the electricalconductivity decreases with the logarithm of time, sigma ln(t).Temperature-dependent conductivity measurements of the deposits reveal that theelectrical transport takes place by means of electron tunneling either betweenW-metal grains or between grains and trap sites in the matrix. After ventingthe electron microscope the electrical conductivity of the deposits shows adegradation behavior, which depends on the composition. Electronpost-irradiation increases the electrical conductivity of the deposits.

Transient electrical conductivity of W-based electron beam induced deposits during growth, irradiation and exposure to air