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A new transmission-type electron multiplier was fabricated fromsilicon-on-insulator (SOI) material by integrating an array of one dimensional(1D) silicon nanopillars onto a two dimensional (2D) silicon membrane. Primaryelectrons are injected into the nanopillar-membrane system from the flatsurface of the membrane, while electron emission from the other side is probedby an anode. The secondary electron yield (SEY) from nanopillars is found to beabout 1.8 times that of plane silicon membrane. This gain in electron number isslightly enhanced by the electric field applied from the anode. Furtheroptimization of the dimensions of nanopillars and membrane and application offield emission promise an even higher gain for detector applications and allowfor probing of electronic/mechanical excitations in nanopillar-membrane systemexcited by incident particles or radiation.

Nanopillar Arrays on Semiconductor Membranes as Electron Emission Amplifiers