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The effects of Mg deficiency in MgB2 films grown by using hybridphysical-chemical vapor deposition were investigated after vacuum annealing atvarious temperatures. High-quality MgB2 films grown on c-cut Al2O3 substrateswith different superconducting transition temperatures (Tc) of 40.2 and 41 Kwere used in this study. As the annealing temperature was increased from 200 to800 C, the Mg contents in the MgB2 films systemically decreased, but the Tc'sdid not change, within 0.12 K, until the annealing temperature reached 700 C.For MgB2 films annealed at 800 C for 30 min, however, no superconductivity wasobserved, and the temperature dependence of the resistivity showed asemiconducting behavior. We also found that the residual resistivity ratiodecreased with increasing annealing temperature.

Influence of Mg Deficiency on the Superconductivity in MgB2 Thin Films Grown by using HPCVD