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Thermal noise arising from mechanical dissipation in oxide coatings is amajor limitation to many precision measurement systems, including opticalfrequency standards, high resolution optical spectroscopy and interferometricgravity wave detectors. Presented here are measurements of dissipation as afunction of temperature between 7 K and 290 K in ion-beam sputtered Ta2O5 dopedwith TiO2, showing a loss peak at 20 K. Analysis of the peak provides the firstevidence of the source of dissipation in doped Ta2O5 coatings, leading topossibilities for the reduction of thermal noise effects.

Measurements of a low temperature mechanical dissipation peak in a single layer of Ta2O5 doped with TiO2