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Averaged plasma parameters such as electron distribution function andelectron density are determined by characterization of high frequency (2.4 GHz)nitrogen-plasma using both experimental methods, namely optical emissionspectroscopy (OES) and microphotography, and numerical simulation. Both directand stepwise electron-impact excitation of nitrogen emissions are considered.The determination of space-resolved electron distribution function, electrondensity, rate constant for electron-impact dissociation of nitrogen moleculeand the production of nitrogen atoms, applying the same methods, is discussed.Spatial distribution of intensities of neutral nitrogen molecule and nitrogenmolecular ion from the microplasma is imaged by a CCD camera. The CCD imagesare calibrated using the corresponding emissions measured byabsolutely-calibrated OES, and are then subjected to inverse Abeltransformation to determine space-resolved intensities and other parameters.The space-resolved parameters are compared, respectively, with the averagedparameters, and an agreement between them is established.

journal of physics. d, applied physics

Space-resolved characterization of high frequency atmospheric-pressure  plasma in nitrogen applying optical emission spectroscopy and numerical  simulation