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Uniform amorphous carbon film is deposited on the inner surface of quartztube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsedfilamentary plasma source is used for the deposition. Long plasma filaments (~140 mm) as a positive discharge are generated inside the tube in argon withmethane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusionthat deposited film is amorphous composed of non-hydrogenated sp2 carbon andhydrogenated sp3 carbon. Plasma is characterized using optical emissionspectroscopy, voltage-current measurement, microphotography and numericalsimulation. On the basis of observed plasma parameters, the kinetics of thefilm deposition process is discussed.

Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source