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Radio frequency driven plasma jets are frequently employed as efficientplasma sources for surface modification and other processes at atmosphericpressure. The radio-frequency driven micro atmospheric pressure plasma jet($\mu$APPJ) is a particular variant of that concept whose geometry allowsdirect optical access. In this work, the characteristics of the $\mu$APPJoperated with a helium-oxygen mixture and its interaction with a heliumenvironment are studied by numerical simulation. The density and temperature ofthe electrons, as well as the concentration of all reactive species are studiedboth in the jet itself and in its effluent. It is found that the effluent isessentially free of charge carriers but contains a substantial amount ofactivated oxygen (O, O$_3$ and O$_2(^1\Delta)$). The simulation results areverified by comparison with experimental data.

Spatially resolved simulation of a radio frequency driven micro atmospheric pressure plasma jet and its effluent