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In this article, an overview of the fabrication and properties of highquality La0.67Sr0.33MnO3 (LSMO) thin films is given. A high quality LSMO filmcombines a smooth surface morphology with a large magnetization and a smallresidual resistivity, while avoiding precipitates and surface segregation. Inliterature, typically only a few of these issues are adressed. We thereforepresent a thorough characterization of our films, which were grown by pulsedlaser deposition. The films were characterized with reflection high energyelectron diffraction, atomic force microscopy, x-ray diffraction, magnetizationand transport measurements, x-ray photoelectron spectroscopy and scanningtransmission electron microscopy. The films have a saturation magnetization of4.0 {\mu}B/Mn, a Curie temperature of 350 K and a residual resistivity of 60{\mu}{\Omega}cm. These results indicate that high quality films, combining bothlarge magnetization and small residual resistivity, were realized. A comparisonbetween different samples presented in literature shows that focussing on asingle property is insufficient for the optimization of the deposition process.For high quality films, all properties have to be adressed. For LSMO devices,the thin film quality is crucial for the device performance. Therefore, thisresearch is important for the application of LSMO in devices.

Optimized fabrication of high quality La0.67Sr0.33MnO3 thin films considering all essential characteristics