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We have investigated the nanostructure and microstructure resulting from nslaser irradiation simultaneous with deposition of Co films on Si(001)substrates. The spatial order and length scales of the resulting nanopatternsand their crystalline microstructure were investigated as a function of filmthickness h and laser energy density E using a combination of atomic force,scanning electron and transmission electron microscopies. The results could beclassified into two distinct categories based on the laser energy density used.It was observed that the thickness-dependent E required to melt the Co film(E_{Co}) was lower than Si (E_{Si}) primarily because of the higherreflectivity of Si. Consequently, for energy densities E_{Co}<E_{1}<E_{Si} thatpreferentially melted the Co film, spatially ordered nanoparticles were formedand were attributed to capillary-driven transport in the liquid phase. Theordering length scale corresponded to the interference fringe spacing \Lambdaand the microstructure was primarily Co metal and a metal-rich silicide phase.The native oxide layer played an important role in minimizing the Co-Sireaction. For laser energy densities E_{2}\geq E_{Si}, spatially orderedpatterns with periodic length scales L<\Lambda were observed and resulted frominterference of an incident laser beam with a beam transmitted into the Sisubstrate. These nanopatterns showed one- as well as two-dimensional spatialordering of the nanostructures. The microstructure in this laser energy regimewas dominated by silicide formation. These results suggest that variousnanostructures and microstructures, ranging from nearly pure metal to a Si-richsilicide phase can be formed by appropriate choice of the laser energysimultaneous with film growth.Comment: Submitted to J. Phys. D: Appl. Phy

Nanostructure and microstructure of laser-interference-induced dynamic patterning of Co on Si