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The micro-properties (structure and composition), and macro-properties(electrical and optical properties) of zinc oxide (ZnO) thin films deposited onglass substrates using a filtere vacuum arc deposition (FVAD) system wereinvestigated as a function of oxygen pressure (0.37 - 0.5 Pa) and arc current(100 - 300 A). Correlations between the various properties were investigated

Dependence of zinc oxide thin film properties on filtered vacuum arc deposition parameters