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Spectroscopic + photometric redshifts, stellar mass estimates, and rest-framecolors from the 3D-HST survey are combined with structural parametermeasurements from CANDELS imaging to determine the galaxy size-massdistribution over the redshift range 0<z<3. Separating early- and late-typegalaxies on the basis of star-formation activity, we confirm that early-typegalaxies are on average smaller than late-type galaxies at all redshifts, andfind a significantly different rate of average size evolution at fixed galaxymass, with fast evolution for the early-type population, R_eff ~ (1+z)^-1.48,and moderate evolution for the late-type population, R_eff ~ (1+z)^-0.75. Thelarge sample size and dynamic range in both galaxy mass and redshift, incombination with the high fidelity of our measurements due to the extensive useof spectroscopic data, not only fortify previous results, but also enable us toprobe beyond simple average galaxy size measurements. At all redshifts theslope of the size-mass relation is shallow, R_eff ~ M_star^0.22, for late-typegalaxies with stellar mass >3x10^9 M_sol, and steep, R_eff M_star^0.75, forearly-type galaxies with stellar mass >2x10^10 M_sol. The intrinsic scatter is<~0.2 dex for all galaxy types and redshifts. For late-type galaxies, thelogarithmic size distribution is not symmetric, but skewed toward small sizes:at all redshifts and masses a tail of small late-type galaxies exists thatoverlaps in size with the early-type galaxy population. The number density ofmassive (~10^11 M_sol), compact (R_eff < 2 kpc) early-type galaxies increasesfrom z=3 to z=1.5-2 and then strongly decreases at later cosmic times.

3D-HST+CANDELS: The Evolution of the Galaxy Size-Mass Distribution since $z=3$