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We present deep u*-, and g-band images taken with the MegaCam on the 3.6 mCanada-France-Hawaii Telescope (CFHT) to support the extragalactic component ofthe Spitzer First Look Survey (hereafter, FLS). In this paper we outline theobservations, present source catalogs and characterize the completeness,reliability, astrometric accuracy and number counts of this dataset. In thecentral 1 deg2 region of the FLS, we reach depths of g~26.5 mag, and u*~26.2mag (AB magnitude, 5$\sigma$ detection over a 3" aperture) with ~4 hours ofexposure time for each filter. For the entire FLS region (~5 deg2 coverage), weobtained u*-band images to the shallower depth of u*=25.0--25.4 mag (5$\sigma$,3" aperture). The average seeing of the observations is 0.85" for the centralfield, and ~1.00" for the other fields. Astrometric calibration of the fieldsyields an absolute astrometric accuracy of 0.15" when matched with the SDSSpoint sources between 18<g<22. Source catalogs have been created usingSExtractor. The catalogs are 50% complete and greater than 99.3% reliable downto g~26.5 mag and u*~26.2 mag for the central 1 deg2 field. In the shalloweru*-band images, the catalogs are 50% complete and 98.2% reliable down to24.8--25.4 mag. These images and source catalogs will serve as a usefulresource for studying the galaxy evolution using the FLS data.

Deep u*- and g-band Imaging of the Spitzer Space Telescope First Look Survey Field : Observations and Source Catalogs