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Due to high light absorption and high refractive index of silicon nitride (Si 3 N 4 ) ceramic, it is difficult to prepare Si 3 N 4  slurry with favorable curing ability, high solid loading and low viscosity at the same time, and thus the high-quality Si 3 N 4  parts are hard to fabricate via Digital Light Processing (DLP). In this paper, the oxidation process was used to enhance the curing behavior of Si 3 N 4  slurry, and then silane coupling agent (KH560) was used to improve the rheological properties of the oxidized Si 3 N 4  slurry. The effect of Si 3 N 4  slurry with oxidation and modification on its rheological behavior, light absorption, curing ability and stability have been systematically investigated. A Si 3 N 4  slurry with abundant photocuring ability, high solid loading, low viscosity and reliable stability was fabricated by the oxidized (1 h) and KH560 (1 wt.%) modified Si 3 N 4  powders, and the dense Si 3 N 4  ceramic parts were produced by this slurry via DLP 3D printing. Subsequently, the influence of oxidation and modification on microstructure, mechanical properties and thermal conductivity have been investigated. Finally, the microstructure and performances of Si 3 N 4  ceramic were compared between different forming processes (including: DLP and cool isostatic pressing).

Digital light processing 3D printing of surface-oxidized Si 3 N 4 coated by silane coupling agent