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The design criteria for the Flat Panel Display (FPD) fields are now expanded to the fabrication environment. This is due to the fast growth of the FPD market. Especially in the FPD fabrication cleanrooms, the defect rate of final products becomes significantly affected by airborne contamination. We focus our attention on the reduction of airborne contamination. The evaluation of design parameters capable of contamination control is undertaken. The substantiated profile for the most favorable design parameter is devised. The systematic approach to carry out the fluid dynamics simulation of huge and complex FPD cleanrooms is proposed. To verify the appointed design parameter, devised profile, and proposed approach, flow simulations of actual FPD cleanrooms are performed and the specified design parameter is implemented into the actual FPD cleanroom fabrication. The overall results verify that the strategy is proper and reliable.

Favorable Design Parameter to Control Contamination Associated in FPD Fabrication Cleanrooms