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A comprehensive micro-electro mechanical systems (MEMS) model for analysis of a smart composite piezothermoelastic thin plate with voids, in context of Lord-Shulman theory of thermoelasticity has been developed. The work culminates in the derivation of the closed form analytic expressions for thermoelastic damping, frequency shift, electric potential change, volume fraction change, and displacements. Some numerical illustrations and graphical interpretations of analytical developments in case of PZT-5A material piezothermoelastic plate under clamped-simply supported (CS) and simply supported-simply supported (SS) boundary conditions have been presented with the help of MATLAB programming software.

Analysis of thermoelastic damping and modeling of piezothermoelastic plate resonators with voids