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In this paper, the mechanics of shear deformable micro beams is investigated via finite element analysis, and a machine learning technique (Deep Learning Neural Network (DLNN)). DLNN is provided for the first time to accurately model and predict this behavior. Using the Finite Element Method (FEM), the obtained coupled equations of motion for shear deformable micro-scale beams are solved using a combination of Timoshenko beam theory and the modified couple stress theory (MCST). The results are compared with literature for each analysis to show the accuracy and the proposed finite element model. After presenting the mechanical model, by using Finite Element Analysis (FEA), a deep learning neural network model is developed for small-scale structures and the capability of this model in predicting different mechanical behavior under thermo-mechanical loading is investigated. It is shown that the presented model has great accuracy in predicting both static and dynamic behavior of small-scale structures with a significant reduction in the computational cost. The application of DLNN for modeling the machines of small- scale structures is a step forward for predicting the behavior of Nano/Micro Electro Mechanical Systems (NEMS/MEMS).

On the mechanics of shear deformable micro beams under thermo-mechanical loads using finite element analysis and deep learning neural network